滨松HAMAMATSU    EQ-77-QZ-S   激光驱动光源 (LDLS)
  • 滨松HAMAMATSU    EQ-77-QZ-S   激光驱动光源 (LDLS)

滨松HAMAMATSU EQ-77-QZ-S 激光驱动光源 (LDLS)

滨松HAMAMATSU    EQ-77-QZ-S   激光驱动光源 (LDLS)

特点

  • Extremely broad wavelength range:170 nm to 2500 nm
  • Long lifetime:10 000 hours
  • High radiance from a small plasma


光谱辐射照度

详细参数

 

ParameterDescription / ValueUnit
Optical interface*1Diverging beam (Single beam)
Wavelength range170 to 2500nm
Plasma size (FWHM)Typ.125 × 320μm
Numerical apertureNA0.5
Lifetime*2Typ.10 000h
Warm-up time30min
Laser classClass 1
Spectral radiance(at 500 nm)Typ.75mW/mm2·sr·nm
Broadband optical powerTyp.2.75W
Output window sizeΦ22mm
Window material*3Quartz
Cooling methodWater cooling*4*5
Nitrogen purgeRequired. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG
Applicable standardsEN 61010-1
EN 61326-1
IEC 60825-1
IEC 62471
EN 50581
Device configurationLamphead, Power supply controller, Remote control, Necessary cables
Power ratingInput voltage (AC)100 to 240V
Power frequency50 / 60Hz
Power consumption350W

*1 Dual-beam output mode can be selected as an option. See page 4 for detailed information.

*2 Windows may need to be replaced depending on the extent of contamination and usage conditions.

*3 YAG (190 nm to 2500 nm) and BK7 (350 nm to 2500 nm) windows are also selectable as options.

*4 Cooling water conditions Lamphead: ≥0.5 L/min, 18 °C to 30 °C, 100 psiG (0.69 MPa) max. inlet pressure Controller: No cooling required

*5 A chiller kit is available as an option.


外形尺寸图(单位:mm)

Lamphead

Controller

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