滨松HAMAMATSU    EQ-400-RH-QZ-S   激光驱动光源 (LDLS)
  • 滨松HAMAMATSU    EQ-400-RH-QZ-S   激光驱动光源 (LDLS)

滨松HAMAMATSU EQ-400-RH-QZ-S 激光驱动光源 (LDLS)

滨松HAMAMATSU   EQ-400-RH-QZ-S    激光驱动光源 (LDLS)

特点

  • Extremely broad wavelength range:170 nm to 2500 nm
  • Long lifetime:10 000 hours
  • High radiance from a small plasma


光谱辐射照度

详细参数

 

ParameterDescription / ValueUnit
Optical interface*1Diverging beam (Single beam)
Wavelength range170 to 2500nm
Plasma size (FWHM)Typ.370 × 800μm
Numerical apertureNA0.5
Lifetime*2Typ.10 000h
Warm-up time30min
Laser classClass 4
Spectral radiance(at 500 nm)Typ.110mW/mm2·sr·nm
Broadband optical powerTyp.15W
Output window sizeΦ22mm
Window material*3Quartz
Cooling methodWater cooling*4*5
Nitrogen purgeRequired. Grade 4.8 or higher, filtered to 5 μm. 20 psiG ±2 psiG
Applicable standardsEN 61010-1
EN 61326-1
IEC 60825-1
IEC 62471
EN 50581
Device configurationLamphead, Power supply controller, Necessary cables
Power ratingInput voltage (AC)200 to 240V
Power frequency50 / 60Hz
Power consumption1700W

*1 Dual-beam output mode can be selected as an option. See page 4 for detailed information.

*2 Windows may need to be replaced depending on the extent of contamination and usage conditions.

*3 BK7 (350 to 2500) windows are also selectable as options.

*4 Cooling water conditions

Lamphead: 1 L/min, 18 °C to 30 °C, 90 psiG (0.62 MPa) max. inlet pressure

Controller: 3 L/min to 4 L/min, 18 °C to 24 °C, 90 psiG (0.62 MPa) max. inlet pressure

*5 A chiller kit is available as an option.


外形尺寸图(单位:mm)

Lamphead

Controller

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